Symbol00995794
ApprovalRCM trademark c UL us listed (OL)
CE mark (see declaration of conformity)To EU EMC Directive In accordance with EU RoHS Directive
UKCA marking (see declaration of conformity)To UK RoHS instructions
Certificate issuing authorityUL E322346
Note on materialsRoHS-compliant
Measured variableMass flow rate Volumetric flow rate
Flow directionBidirectional
Measuring principleThermal
Measurement methodHeat transfer
Start value for flow rate measuring range0.02 l/min
End value for flow rate measuring range1 l/min
Operating pressure-0.9 bar ... 10 bar
Operating mediumCompressed air to ISO 8573-1:2010 [6:4:4] Nitrogen
Media temperature0 °C ... 50 °C
Ambient temperature0 °C ... 50 °C
Nominal temperature23 °C
Accuracy of flow rate± (2% o.m.v. + 1% FS)
Repetition accuracy offset in ± %FS0.2 %FS
Repetition accuracy span in ± %FS0.8 %FS
Temperature coefficient span in ± %FS/KTyp. 0.15%FS/K
Pressure influence span in ± %FS/bar1 %FS/b.
Switching output2 x PNP or 2 x NPN, switchable
Switching functionWindow comparator Threshold value comparator Auto difference monitoring
Switching element functionN/C or N/O contact, switchable
Max. output current100 mA
Analogue output0 - 10 V 4 - 20 mA 1 - 5 V
Flow characteristic curve start value-1 l/min
Flow characteristic curve end value1 l/min
Max. load resistance current output500 Ohm
Min. load resistance voltage output20 kOhm
Short circuit current ratingyes
Overload protectionAvailable
ProtocolIO-Link®
IO-Link, Protocol versionDevice V 1.1
IO-Link, ProfileSmart sensor profile
IO-Link, Function classesBinary data channel (BDC) Process data variable (PDV) Identification Diagnostics Teach channel
IO-Link, communication modeCOM2 (38.4 kBaud)
IO-Link, SIO-Mode supportYes
IO-Link, Port classA
IO-Link, Process data length IN3 bytes
IO-Link, Process data content IN1 bit BDC (volume monitoring) 14 bit PDV (measured flow value) 2 bit BDC (flow monitoring)
IO-Link, Service data IN32-bit volume/mass measurement
IO-Link, Min. cycle time4 ms
IO-Link, Data storage required<500 Byte
Operational voltage range DC22 V ... 26 V
No-load supply current≤25 mA
Reverse polarity protectionFor all electrical connections
Electrical connection 1, connection typePlugs
Electrical connection 1, connector systemM8x1, A-coded, to EN 61076-2-104
Electrical connection 1, number of connections/cores4
Electrical connection 1, type of mountingNot rotatable
Electrical connection 1, compatible type of mountingCompatible with latching lock Compatible with rotatable screw-type lock
Electrical connection 1, connection pattern00991171
Type of mountingWith accessories
Mounting positionoptional
Pneumatic connectionFor tubing O.D. 4 mm
Pneumatic connection, outlet directionStraight
Product weight60 g
Material housingPA-reinforced
Material in contact with the mediumSilicon Silicon nitride High-alloy stainless steel
Display typeIlluminated LCD, multi-colour
Displayable unitsg g/min l l/h l/min scft scft/h
Setting optionsIO-Link® Teach-in Via display and keys
Protection against tamperingIO-Link PIN code
Degree of protectionIP40
Pressure drop<5 mbar
Protection classIII
Corrosion resistance class CRC2 - Moderate corrosion stress
LABS (PWIS) conformityVDMA24364-B2-L
Cleanroom suitability, measured according to ISO 14644-14Class 4 according to ISO 14644-1
Pollution degree3